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Motorized XY-Rotation Alignment Stages

These XY-theta stages are designed for XY-rotation axes configuration.

This series is surface treated to ensure durability and resilience.

It moves in XY-plane and rotates around the center of the XY-plane.

The terms alignment table or XY-rotation stage are often used interchangeably with XY-theta stage.

These stages are compatible with OES' line of Motion Controllers..


  • Compact

  • Hollow or Solid Structure

  • High Stiffness and High Precision

  • Size From 15 mm by 15 mm to 100 mm by 100 mm of Linear Travel

  • Super-Thin and Light-Weight

  • Pre-Pressurized the Special Cross-Roller Bearing

  • Can Be Applied to the Optic Checking Devices for Continuity


  • Semiconductor Equipment

  • Panel Lamination Machinery

  • Panel Film Laminating Machines

  • Print Screen and 3D Printing

  • CNC Equipment

  • Angular Glass Cutting & Grinding Equipment

  • Wafer Alignment Equipment

  • Exposure Equipment

  • Semiconductor Equipment

  • Vision Inspection

  • Laser Measurement and Inspection

  • Optical Measurement and Inspection

  • Precision Mechanical Positioning

  • Precision Mechanical Measurement and Inspection

  • Precision Positionning for High Accuracy Process Demand

  • High Precision CNC Machine

  • Production Process of LCD

  • Display Panel

  • Medical Equipment

  • Printing

  • Coating Equipment

  Series Work Table Diameter Linear Stroke Rotary Stroke Load (kg)

Motorized Three-axis XY Plane and Rotary Stage

XYR-02 60 mm and 100 mm   10 mm by 10 mm 360 Continuous 9 kg



Motorized Three-axis XY Plane and Rotary Stage

XYR-03 60 mm and 100 mm 25 mm by 25 mm 360 Continuous 9 kg



Motorized Three-axis XY Plane and Rotary Stage


XYR-04 60 mm and 100 mm 50 mm by 50 mm 360 Continuous 45 kg



Related Products
Motion Controllers
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