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Motorized XY-Rotation Alignment Stages

These XY-theta stages are designed for XY-rotation axes configuration.

This series is surface treated to ensure durability and resilience.

It moves in XY-plane and rotates around the center of the XY-plane.

The terms alignment table or XY-rotation stage are often used interchangeably with XY-theta stage.

These stages are compatible with OES' line of Motion Controllers..
 

Features 

  • Compact

  • Hollow or Solid Structure

  • High Stiffness and High Precision

  • Size From 15 mm by 15 mm to 100 mm by 100 mm of Linear Travel

  • Super-Thin and Light-Weight

  • Pre-Pressurized the Special Cross-Roller Bearing

  • Can Be Applied to the Optic Checking Devices for Continuity

Applications

  • Semiconductor Equipment
     

  • Panel Lamination Machinery

  • Panel Film Laminating Machines

  • Print Screen and 3D Printing
     

  • CNC Equipment
     

  • Angular Glass Cutting & Grinding Equipment
     

  • Wafer Alignment Equipment
     

  • Exposure Equipment
     

  • Semiconductor Equipment
     

  • Vision Inspection
     

  • Laser Measurement and Inspection
     

  • Optical Measurement and Inspection
     

  • Precision Mechanical Positioning
     

  • Precision Mechanical Measurement and Inspection
     

  • Precision Positionning for High Accuracy Process Demand
     

  • High Precision CNC Machine
     

  • Production Process of LCD
     

  • Display Panel
     

  • Medical Equipment
     

  • Printing
     

  • Coating Equipment

  Series Work Table Diameter Linear Stroke Rotary Stroke Load (kg)
           
 

Motorized Three-axis XY Plane and Rotary Stage

XYR-02 60 mm and 100 mm   10 mm by 10 mm 360 Continuous 9 kg

 

         
           
 

Motorized Three-axis XY Plane and Rotary Stage

XYR-03 60 mm and 100 mm 25 mm by 25 mm 360 Continuous 9 kg

 

         
           
 

Motorized Three-axis XY Plane and Rotary Stage

 

XYR-04 60 mm and 100 mm 50 mm by 50 mm 360 Continuous 45 kg

 

         

Related Products
Motion Controllers
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